3M™ CMP Pad Conditioner Brush PB32A TDS
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3M™ CMP Pad Conditioner Brush PB32A-1, 4.25-in dia
- Part Number PB32A
- 3M ID 7000000274
- UPC 00051111900925
Details
Highlights
- Excellent for soft CMP pads, including microreplicated, porometric and felt-based pads
- Efficient pad cleaning and slurry distribution helps manufacturers enable low cost of ownership
- Metal-free, polymer bristles resist corrosion
- Durable bristles are independently fixed across the brush surface
- 3M™ CMP brush connects easily to polishing tool end effector
- Designed for semiconductor grade CMP processes
Engineered specifically for chemical mechanical polishing (CMP) pad cleaning applications, our 3M™ CMP Pad Conditioner Brush is excellent for efficient pad cleaning and slurry distribution which helps manufacturers reduce cost of ownership in semiconductor operations. These 3M CMP brushes are part of a full range of 3M CMP solutions.
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Excellent for use with soft CMP pads
Strong, durable bristles are independently anchored and evenly distributed across the 3M brush surface, making the 3M brush ideal for removing pad debris from soft microreplicated, porometric and felt-based CMP pads. Bristles are made from an exclusive polymer that resists corrosion much better than metal. The polycarbonate carrier features a universal mounting configuration, making for easy connection to a wide range of polishing tools and effectors.
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Redefining CMP Materials
3M™ CMP Pad Conditioner Brushes
Typical properties
| Abrasive Material | Nylon Fibers |
| Abrasive Working Surface | Full Face |
| Application | CMP, Wafer Manufacturing, Pad Cleaning, Advanced Node (Memory & Logic) |
| Brands | 3M™ |
| CMP Process | W (Buff), Cu (Barrier), Final Buff |
| Carrier Diameter (Imperial) | 4.25 in |
| Carrier Diameter (Metric) | 107.95 mm |
| Carrier Form | Disc |
| Carrier Material | Polycarbonate |
| Product Series | PB32A |
| Product Type | Brush |
Resources
Data Sheets
(PDF, 373KB)
Data Sheets
(PDF, 120KB)
Data Sheets
(PDF, 102KB)
Data Sheets
(PDF, 116KB)
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| Carrier Diameter (Metric) | 107.95 mm | |||
| Carrier Diameter (Imperial) | 4.25 in |
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