3M™ Trizact™ Polishing Pad HT-800-PC

3M Product Number HT-800-PC
3M ID B5005067114

Effective lapping and polishing for ultra-hard substrates such as silicon carbide and ceramics

Improved total pad life time and reduced total thickness variation (TTV), high removal rate and better surface finish compared to the copper platen process when used with 3M™ Trizact™ Composite Slurry, a good option for the rough lapping step

Alternative to copper platen process with no need to re-groove copper platen and no copper in polishing waste

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Frequently viewed resources

Tech Data Sheet (PDF, 184KB)

Details

Highlights

Effective lapping and polishing for ultra-hard substrates such as silicon carbide and ceramics
Improved total pad life time and reduced total thickness variation (TTV), high removal rate and better surface finish compared to the copper platen process when used with 3M™ Trizact™ Composite Slurry, a good option for the rough lapping step
Alternative to copper platen process with no need to re-groove copper platen and no copper in polishing waste
800 micron cell height for longer pad life
High removal rates, a good option for rough lapping step
Good surface finish
Low TTV
Can be directly mounted onto flat/smooth and waffle pattern lapping plates
Easy pad replacement

3M™ Trizact™ Polishing Pad HT-800-PC is a microreplicated composite slurry lapping pad used for finishing ultra-hard substrates such as silicon carbide and sapphire.

Comprised of a microreplicated surface with a pressure-sensitive adhesive and polycarbonate core, Trizact polishing pad HT-800-PC produces a good surface finish with high removal rates for an economical finishing solution when combined with 3M™ Trizact™ Composite Slurry. This pad can be adhered to typical single- or double-sided lapping platens and is a good option for the rough lapping step.

Typical properties

Details

Application	Polishing, Finishing, Scratch Removal, Lapping
Product Usage	Ultra-hard Substrates, Semiconductor Wafers
Substrate	Gallium Arsenide, Gallium Nitride, Lithium Tantalate, Sapphire, Silicon Aluminum, Silicon Carbide, Silicon Nitride

Resources

3M™ Trizact™ Polishing Pad HT-800-PC TDS

Data Sheets

(PDF, 184KB)

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