3M™ Diamond Pad Conditioner

(SPEECH) [MUSIC PLAYING] (DESCRIPTION) Text: 3M Science. Applied to Life. 3M CMP Pad Conditioner Coatings, Redefining metal contamination protection in CMP. Could your CMP process be suffering from metal contamination? (SPEECH) In today's advanced and mature nodes semiconductor manufacturing processes, metal contamination is becoming an increasingly common driver of high defect rates and low yields. (DESCRIPTION) Processes potentially sensitive to metal contamination: Advanced node, Mature node, Silicon and silicon carbide wafer manufacturing. Common metal contamination types: Nickel, Manganese, Iron. (SPEECH) Plus, slurries are getting harsher. Metal film CMP processes, like tungsten and copper, or substrates, like silicon carbide, call for more acidic slurries and faster slurry flow to get polishing done fast. (DESCRIPTION) Animation of the CMP process. (SPEECH) But the harsher the slurry, the higher the risk of leaching metal out of the pad conditioner and into the wafer. (DESCRIPTION) Metals float from the conditioner into the wafer. (SPEECH) Or even damaging the metal matrix enough for diamonds to fall off and scratch the wafer. (DESCRIPTION) A scratched wafer. (SPEECH) For over a decade, 3M Trizact brand pad conditioners have offered effective polishing on a ceramic substrate to help minimize metal leaching. (DESCRIPTION) Image of the substrate. (SPEECH) Now innovative CMP coatings bring powerful metal leaching protection to all 3M brand pad conditioners. 3M coatings can help reduce contamination from nickel, iron, manganese and other metals by up to 99%. (DESCRIPTION) A chart shows this. (SPEECH) These clear, ultra thin coatings can be applied to any 3M pad conditioner providing protection with equivalent polishing performance. (DESCRIPTION) A chart shows the removal rate with 3M coating, which is around 1000 to 1500. (SPEECH) For highly demanding applications, combine 3M Trizact brand pad conditioners, or 3M brand flexible pad conditioners, with a coating to protect the carrier as well, helping ensure peak performance for thousands of wafers polished. (DESCRIPTION) A polisher moves back and forth across a wafer. (SPEECH) Learn more about 3M CMP coatings at 3M.com/CMP. [MUSIC PLAYING] (DESCRIPTION) IMPORTANT NOTICE Regulatory: For regulatory information about this product contact your 3M representative. Technical Information: The technical information, recommendations and other statements contained in this document are based upon tests or experience that 3M believes are reliable, but the accuracy or completeness of such information in not guaranteed. Product Use: Many factors beyond 3M's control and uniquely within user's knowledge and control can affect the use and performance of a 3M product in a particular application. Given the variety of factors that can affect the use and performance of a 3M product, user is solely responsible for evalulating the 3M product and determining whether it is fit for a particular purpose and suitable for user's method of application. Warranty, Limited Remedy, and Disclaimer: Unless a different warranty is specifically stated on the applicable 3M product packaging or product literature, 3M warrants that each 3M product meets the applicable 3M product specifications on the Certificate of Analysis, which is established when the product is manufactured and deemed commercially available and is provided of the time 3M ships the product. 3M MAKES NO OTHER WARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OR CONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY OR CONDITION ARISING OUT OF A COURSE OF DEALING, CUSTOM, OR USAGE OF TRADE. If a 3M product does not conform to this warranty, then the sole and exclusive remedy is, at 3M's option, replacement or repair of the 3M product or refund of the purchase price. Limitation of Liability: Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product, whether direct, indirect, special, incidental or consequential, regardless of the legal or equitable theory asserted, including but not limited In warranty, contract negligence, or strict liability Disclaimer: For industrial use only. Not intended, labeled or packaged for consumer sale or use. Electronics Materials Solutions Division, 3M Center, Building 224 3N 11, St. Paul, MN, 55144-1000. 1-800-261-8634. phone, 661 778 4244. fax, www.3M.com slash CMP. 3M and Trizact are trademarks of 3M Company. All other trademarks an property of their respective owners. Copyright 3M 2024. All rights reserved.