3M™ Diamond Pad Conditioner Bar

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Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership

Optimized for extended pad and disk life

Diamonds secured with both chemical and mechanical bonds for great retention

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Details

Highlights
  • Helps to reduce the number of maintenance shutdowns, increasing the potential for lower cost of ownership
  • Optimized for extended pad and disk life
  • Diamonds secured with both chemical and mechanical bonds for great retention

Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.

Typical properties

Abrasive Material

Nickel-based Alloy with Patterned Diamond

Abrasive Working Surface

Full Face

Application

CMP, Wafer Manufacturing

CMP Process

W (Bulk), Cu (Bulk)

Carrier Form

Bar

Carrier Length (Imperial)

11.63 in

Carrier Length (Metric)

295.402 mm

Carrier Material

316 Stainless Steel

Diamond Size

251 micron

Factory ISO Certification

No ISO Certification information available

Product Series

R400

Product Type

Diamond Pad Conditioner

Resources

Safety Data Sheets

Document Number: MSDS_0884890_US_EN

(PDF)

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