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Highly engineered pad conditioners deliver reliable performance for critical semiconductor CMP applications. Utilizes Sintered Abrasive Technology for excellent diamond retention, with controlled diamond placement and protrusion.
Abrasive Material | Nickel-based Alloy with Patterned Diamond |
Abrasive Working Surface | Full Face |
Application | CMP, Wafer Manufacturing |
CMP Process | W (Bulk), Cu (Bulk) |
Carrier Form | Bar |
Carrier Length (Imperial) | 11.63 in |
Carrier Length (Metric) | 295.402 mm |
Carrier Material | 316 Stainless Steel |
Diamond Size | 251 micron |
Factory ISO Certification | No ISO Certification information available |
Product Series | R400 |
Product Type | Diamond Pad Conditioner |
Safety Data Sheets
Document Number: MSDS_0884890_US_EN
(PDF)
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