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3M™ Trizact™ Composite Slurry DT-50
- 3M Product Number DT-50
- 3M ID B40055134
Details
Highlights
- Effective lapping and polishing for ultra-hard substrates such as silicon carbide and ceramics
- Improved total thickness variation (TTV), removal rates and surface finish compared to the copper platen process when used with 3M™ Trizact™ Polishing Pads
- High removal rate, good option for rough lapping step
- Good surface finish with high removal rate
- Easy cleanup with water
- Compatible with 3M™ Trizact™ Polishing Pads
- Can be used with either single- or dual-sided lapping tools
- Good option for rough lapping step
3M™ Trizact™ Composite Slurry DT-50 is a low-viscosity lapping slurry for finishing ultra-hard substrates such as sapphire and silicon carbide. Trizact composite slurry DT-50 provides the highest performance when used with 3M™ Trizact™ Polishing Pads.
Comprised of a unique 3 micron diamond composite in triethylene glycol, Trizact composite slurry DT-50 produces a good surface finish with high removal rates for economical lapping. The triethylene glycol in this product is water miscible for easy cleanup.
Typical properties
Resources
Similar products
| Application | Finishing, Lapping, Polishing, Scratch Removal | ||
| Product Usage | Semiconductor Wafers, Ultra-hard Substrates | ||
| Substrate | Gallium Arsenide, Gallium Nitride, Lithium Tantalate, Sapphire, Silicon Aluminum, Silicon Carbide, Silicon Nitride |
3M™ Trizact™ Composite Slurry DT-50
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